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Intlvac Nanochrome Deposition System

• Combination e-beam evaporator and DC magnetron sputtering system
• Possible to sputter and/or evaporate multiple runs without breaking vacuum
• 1 x four pocket e-beam gun
• 1 x 6” DC sputtering gun (Argon used as sputtering gas)
• Automatic pump down cycle
• Automatic e-beam deposition process with rate controller
• Semi-automatic sputtering process; operator enters deposition time based on specific sputtering process
• Materials available for evaporation:
  • Aluminum, Gold, Chromium, Nickel, Titanium
• Materials available for sputtering:
  • Gold, Copper, Aluminum, Silver, Titanium-Tungsten

Intlvac Website