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Clean Room Facilities
Intlvac Nanochrome Deposition System

- Combination e-beam evaporator and DC magnetron sputtering system
- Possible to sputter and/or evaporate multiple runs without breaking
vacuum
- 1 x four pocket e-beam gun
- 1 x 6” DC sputtering gun (Argon used as sputtering gas)
- Automatic pump down cycle
- Automatic e-beam deposition process with rate controller
- Semi-automatic sputtering process; operator enters deposition
time based on specific sputtering process
- Materials available for evaporation:
- Aluminum, Gold, Chromium,
Nickel, Titanium
- Materials available for sputtering:
- Gold, Copper, Aluminum, Silver, Titanium-Tungsten
Intlvac Website