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Clean Room
Intlvac Nanochrome Deposition System
Trion Orion Plasma-Enhanced Chemical Vapour Deposition (PECVD) System
Trion Phantom Reactive Ion Etcher (RIE)
Tousimis Automegasamdri-915B, Critical Point CO2 Dryer
Lindberg/Blue High Temperature Furnace
Bungard Dry Film Laminator
Yellow Room (for Photolithography)
Technic 5-Tank Electroplating System
Maintenance Corridor
EFD Liquid Dispensing System
Logitech CDP Chemical Delayering & Planarization System
